Dissipation through the substrate (anchor loss) and thermoelastic dissipation (TED) of the MEMS gyroscope can also degrade the quality factor (Q-factor) and performance of the device. Frequency ...
EMCORE has a 40-year history in the development of its Quartz MEMS technology introducing the first tactical grade single-axis gyro and inertial measurement ... EMCORE has demonstrated proof of ...
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